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Page 10 of 19         Wan et al. Microstructures 2023;3:2023014  https://dx.doi.org/10.20517/microstructures.2022.36

               Table 5. The quantitative analysis (in atomic percentage) of the XPS spectra of the corroded surface on Cr0, Cr0.6, Cr1 and Cr1.5 in
               Figure 7

                Spectrum             Substance              Cr0       Cr0.6         Cr1       Cr1.5
                Co 2p 3/2            Co                     13.4      17.6          15.6      9.0
                                     CoO                    2.8       0.2           0.9       0.9
                                     Co O 3                 2.1       0.2           1.1       0.2
                                       2
                                     Co(OH) 2               3.7       1.9           3.0       1.1
                Fe 2p 3/2            Fe                     10.1      19.3          16.2      10.2
                                     FeO                    11.0      0.3           1.6       1.1
                                     Fe O                   3.6       0.7           2.0       3.8
                                      2  3
                                     Fe(OH) 3               2.3       1.3           1.2       -
                Mn 2p                Mn                     3.8       11.0          12.4      3.6
                    3/2
                                     MnO                    3.4       2.1           2.1       4.2
                                     Mn O                   10.1      6.8           4.2       10.0
                                       2  3
                                     MnO 2                  8.7       1.9           2.4       2.9
                Ni 2p                Ni                     15.1      13.4          12.7      8.4
                   3/2
                                     NiO                    4.6       1.8           2.2       1.8
                                     Ni(OH) 2               5.3       3.2           2.7       4.3
                Cr 2p 3/2            Cr                     -         12.1          15.7      13.7
                                     Cr O 3                 -         1.8           2.6       18.4
                                       2
                                     Cr(OH)                 -         4.4           1.4       6.4
                                          3

               Figure 8. The depth of the micropore is ~200 nm, in line with the result of the AFM height image in
               Figure 6. Furthermore, the selected cross-section can clearly be divided into two regions. The top region
               above the interface (the dotted line in Figure 8A) is referred to as the oxide film inside the micropore, while
               the region below the interface is the un-corroded matrix. High-resolution TEM image [Figure 8A] along
               with fast Fourier transform (FFT) patterns [Figure 8B and C] reveals that the oxide film consists of both
               amorphous and nanocrystalline (Cr, Mn)O . The boundaries between the nanocrystalline and the
                                                       x
               amorphous phases are considered to provide tunnels for species diffusion and transport, where the
               corrosive ions permeate preferentially, similar to the mechanism that the Cl  ion attacks on the oxide film of
                                                                               -
               the metals . It might be induced by the detrimental effect of Mn, which could be concentrated in the oxide
                        [32]
               film to greatly affect the occurrence of the nanocrystalline phase. The EDS elemental maps [Figure 8E]
               indicate that the oxide film is rich in Mn, Cr and O, but deficient in Fe, Co and Ni.


               EIS
               To understand the corrosion mechanism of Cr MnFeCoNi HEAs in the 0.5 M H SO  solution, the EIS
                                                         x
                                                                                          4
                                                                                       2
               measurements under OCP conditions were conducted and analyzed in Figure 9. In terms of the Nyquist
               plots [Figure 9A], all HEAs have similar features where a depressed capacitive semicircle covers high
               frequency region and some scattered points are distributed randomly near the real axis in the low frequency
               region. The diameter of the capacitive semicircle first decreases from Cr0 to Cr0.6 and then increases to
               Cr1.5, indicating the same trend for the corrosion resistance [22,33] . It is found that only one time constant is
               presented in the high frequency of each Bode plot [Figure 9B], indicating the corrosion behavior of the
               passive film. With the decrease of the frequency, the phase angle reduces. The capacitance for the passive
               film increases and the corrosion resistance decreases, suggesting that the etching solution gradually sinks
               into the passive film. Moreover, in the wide range of the low frequency region, the phase angles are all
               approximately 0° and the values of |Z| are constant, which are characteristic of the pure resistance,
               indicating that the passive films on the HEAs are not very compact. Likewise, the value of |Z| at a fixed
               frequency of 0.1 Hz is usually equal to the polarization resistance related to the corrosion resistance .
                                                                                                       [34]
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