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Research Article  |  Open Access

                                            Soft Science


                                       Zhang et al. Soft Sci. 2026, 6, 16      DOI:10.20517/ss.2025.95



               Enhanced supercapacitor performance using an
               anodized stainless steel flexible electrode coated
               with an electron cyclotron resonance carbon film




               Wenlei Zhang , Zhuohao Liu , Jiulong Liu , Chenyu Chai , Peidong Xue , Gang Li , Zhongyun Yuan , Lei
                          1
                                                                           3
                                                                                   2
                                                                                                  1,*
                                       2
                                                              1
                                                  1
               Yang 4
               Keywords:
               Carbon film, anodized
               stainless steel, electron
               cyclotron resonance
               sputtering, cycling stability,
               flexible supercapacitor
               Citation: Zhang, W.; Liu, Z.;
               Liu, J.; Chai, C.; Xue, P.; Li, G.;
               Yuan, Z.; Yang, L. Enhanced
               supercapacitor performance
               using an anodized stainless
               steel flexible electrode
               coated with an electron
               cyclotron resonance carbon
               film. Soft Sci. 2026, 6, 16.
               https://dx.doi.org/10.20517
               /ss.2025.95
                                   Abstract
               Received: 27 Sep 2025
               First Decision: 11 Nov  Electrochemically anodized stainless steel (SS) shows promise as a free-standing electrode
               2025                in   flexible   supercapacitors   due   to   its   low   cost,   eco-friendly   nature,   and   binder-free
               Revised: 24 Dec 2025  characteristics. However, unsatisfactory cycling stability limits its practical use in wearable
               Accepted: 7 Jan 2026  electronics. Herein, we introduce a conductive carbon film deposited on the surface of the
               Published: 4 Mar 2026
                                   anodized SS electrode as a protective layer via electron cyclotron resonance sputtering. By
               Academic Editors:   optimizing the deposition bias voltage and deposition time, the resulting flexible electrode
               Yat Li, Xingcan Huang  exhibits   a   specific   capacitance   of   271.6   mF·cm   at   a   current   density   of   1   mA·cm ,
                                                                           -2
                                                                                                         -2
               Copy Editor:        representing a 2.24-fold increase over the uncoated counterpart, with 88.7% capacitance
               Pei-Yun Wang
               Production Editor:  retention   after   8,000   cycles.   The   enhanced   performance   is   closely   related   to   the
               Pei-Yun Wang        conductivity   of   the   surface   coating,   which   depends   on   the   sp2/sp3   ratio   (the   relative
                                   proportion of graphitic to diamond-like carbon bonding). The carbon film-coated anodized



               1 College of Integrated Circuits & Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education, Taiyuan
               University of Technology, Taiyuan 030024, Shanxi, China.
               2 Institute of Energy Innovation, College of Materials Science and Engineering, Taiyuan University of Technology, Taiyuan 030024, Shanxi,
               China.
               3 Institute of Nanosurface Science and Engineering, Shenzhen University, Shenzhen 518060, Guangdong, China.
               4 Key Laboratory of Education Ministry for Modern Design & Rotor-Bearing System, Xi’an Jiaotong University, Xi’an 710049, Shaanxi,
               China.

               * Correspondence to: Prof. Zhongyun Yuan, College of Integrated Circuits & Key Lab of Advanced Transducers and Intelligent Control
               System of the Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, Shanxi, China. E-mail:
               yuanzhongyun@tyut.edu.cn




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